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  1. DIGILEM - Interferometric Endpoint Detector & Thin Film Monitor

    Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition
    plasma2
    semiconductor2
    semiconductors2
    deposition2
    etch1
    interference1
    Sofie1
    endpoint1
    interferometry1
    film thickness1
    interferometers1
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    endpointer1
    end pointer1
    end point systems1
    endpoint systems1
    etch rate1
    thin film monitors1
    Digilem0
    etching control0
    semiconductor characterisation0

    www.digilem.com - 2009-02-08

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